Main electronic specialty gases
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Classification:
Main electronic specialty gases
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Main electronic specialty gases
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Product Name |
Main application fields and application process |
Stage |
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|
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integrated circuit |
New display |
Photovoltaic |
LED |
|
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High purity boron trichloride(6N5） |
Etching,doping |
etching |
doping |
etching |
Mass production |
|
ultrapure ammonia(7N5） |
Deposition, epitaxy |
Deposition |
Deposition |
Deposition, epitaxy |
Mass production |
|
high purity nitrous oxide(6N） |
Deposition |
Deposition |
Deposition |
Deposition |
Mass production |
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