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Gas Mixture

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NAME

DETIAL

Gas Mixture	Composition
Germane in Hydrogen/Nitrogen/Helium	GeH₄/H₂、N₂、He
Silane in Hydrogen/Nitrogen/Helium	SiH₄/H₂、N₂、He
Phosphine in Hydrogen/Nitrogen/Helium	PH₃/H₂、N₂、He
Diborane in Hydrogen/Nitrogen	B₂H₆/H₂、N₂

The customized gas mixture can be prepared.

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